| 磁电复合薄膜用高性能压电陶瓷靶材的制备 |
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| 引用本文： | 关卡,郝永德,胡作启. 磁电复合薄膜用高性能压电陶瓷靶材的制备[J]. 压电与声光, 2016, 38(1): 16-18 |
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| 作者姓名： | 关卡 郝永德 胡作启 |
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| 作者单位： | （华中科技大学 光学与电子信息学院，湖北 武汉 430074） |
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| 基金项目： | 国家自然科学基金面上资助项目(61271072) |
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| 摘 要： | 采用固相法制备了高性能的Pb(Zr0.54Ti0.46)O3压电陶瓷靶材。通过调整Sr掺杂比例,获得高性能的压电陶瓷配方,以高性能锆钛酸铅(PZT)粉体为原料,经冷等静压和高温烧结制备出磁控溅射需要的、直径为73.6mm的压电陶瓷靶材。
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| 关 键 词： | 锆钛酸铅(PZT) 陶瓷靶材 压电 |
Preparation of High Performance Piezoelectric Ceramic Target for Magnetoelectric Composite Films |
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| GUAN K,HAO Yongde and HU Zuoqi. Preparation of High Performance Piezoelectric Ceramic Target for Magnetoelectric Composite Films[J]. Piezoelectrics & Acoustooptics, 2016, 38(1): 16-18 |
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| Authors: | GUAN K HAO Yongde HU Zuoqi |
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| Affiliation: | (School of Optical and Electronic Information, Huazhong University of Science and Technology,Wuhan 430074,China) |
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| Abstract: | The high performance Pb(Zr0.54Ti0.46)O3 piezoelectric ceramic target was prepared by the solid state sintering method. The formulation of piezoelectric ceramic with high performance was obtained by adjusting the doping ratio of Sr. The piezoelectric ceramic target with diameter of 73.6 mm was prepared for magnetron sputtering by the cold isostatic pressing and high temperature sintering methods, using high performance lead zirconate titanate (PZT) powders as raw materials. |
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| Keywords: | PZT ceramic target piezoelectric |
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