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Optical wafer defect inspection at the 10 nm technology node and beyond |
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| Affiliation: | State Key Laboratory of Digital Manufacturing Equipment and Technology,Huazhong University of Science and Technology,Wuhan 430074,People's Republic of China;School of Astronautics,Harbin Institute of Technology,Harbin 150001,People's Republic of China;Department of Biomedical Engineering,The Chinese University of Hong Kong,Shatin,New Territories,Hong Kong SAR,People's Republic of China |
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