Single core fully integrated CMOS micro-fluxgate magnetometer

A new fully integrated 2D micro-fluxgate magnetometer is presented. This magnetometer is integrated in a standard CMOS process and uses a ferromagnetic core integrated on the chip by a photolithographic post-process compatible with the integrated circuit technology. The cross-shaped ferromagnetic core is placed diagonally above four excitation coils, two for each measurement axis. A novel electronic signal extraction technique is presented. The integrated 2D magnetometer exhibits a sensitivity of 160 V/T and a linear range of ±50 μT. The magnetic equivalent noise spectral density is 70 nT/√Hz at 1 Hz, and the total power consumption is as low as 17 mW for the 5 V power supply.