基于MATLAB的微气压传感器测试系统的气压控制仿真

针对微热板式微气压传感器的静态和动态性能测试,对传感器的真空测试环境进行了实时控制仿真.运用模糊控制算法与模糊PID控制算法,对实验进行了建模及MATLAB仿真,并比较了两种算法的控制效果.结果显示,调整系统控制量的模糊PID控制稳态误差小,控制效果明显优于模糊控制算法.本仿真结果为实现传感器所需真空测试环境1kPa～100kPa的实时气压控制提供了依据.

A Matlab-Based Simulation of Pressure Control for Micro Gas Pressure Sensor Testing System

To realize the real-time control of vacuum environment in the static and dynamic performance test of micro gas pressure sensor with micro-hotplate, simulations to the vacuum testing environment were carried out. Fuzzy Control and Fuzzy PID Control with Adjusting System Control Quantity were applied to set up the model and simulated with MATLAB. Then simulated results of the two control algorithms were compared. The results show that the steady-state errors of Fuzzy PID-Type Controller of Adjusting System Control Quantity fluctuate is less, so it is obviously better than fuzzy control. These simulated results provide the basis for real-time gas pressure control of the 1 kPa~100 kPa vacuum testing environment which the sensor needs.