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非晶态铁电薄膜的铁电相转变
引用本文:杨平雄,邓红梅.非晶态铁电薄膜的铁电相转变[J].材料研究学报,1999,13(2):221-224.
作者姓名:杨平雄  邓红梅
作者单位:[1]中国科学院上海技术物理研究所红外物理国家重点实验室 [2]中国科学院上海冶金研究所
摘    要:用ArF脉冲激光在Pt/Ti/SiO2/Si衬底上合成了非晶态SrBi2Ta2O9铁电薄膜,研究了铁电相转变。采用常规热退火、激光诱导和低温高压水热法使非晶态SBT薄膜发生铁电相转变。

关 键 词:铁电薄膜  PLD  SBT  非晶态  铁电相转变  薄膜

RECRYSTALLIZATION TECHNOLOGY FOR AMORPHOUS FERROELECTRIC THIN FILMS
YANG Pingxiong, DENG Hongmei,ChU Junhao.RECRYSTALLIZATION TECHNOLOGY FOR AMORPHOUS FERROELECTRIC THIN FILMS[J].Chinese Journal of Materials Research,1999,13(2):221-224.
Authors:YANG Pingxiong  DENG Hongmei  ChU Junhao
Affiliation:YANG Pingxiong; DENG Hongmei;ChU Junhao
Abstract:SrBi2Ta2O9 amorphous ferroelectric thin films were synthesised on Pt/Ti/SiO2/Sisubstrate by ArF pulsed laser deposition. The recrystallization for amorphous ferroelectric thin films werestudied. The SBT thin films were crystallized using usual annealing, laser induced and low temperature,high pressure hydrothermal.
Keywords:ferroelectric thin films  PLD  SBT
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