High energy resolution PIXE with high efficiency using the heavy ion microbeam

An X-ray crystal spectrometer using a position sensitive proportional counter combined with tandem microbeam line at Osaka National Research Institute have been developed. This system realizes high energy resolution PIXE analysis using a heavy ion microbeam (E < 6 MeV) with reasonable detection efficiency. The design of the spectrometer, such as detection geometry, detectable energy range and energy resolution, are described. This system was applied to high energy resolution PIXE analysis of Ti, SUS and Si with 2 MeV proton and 5 MeV Si³⁺ focused or collimated beams. The best energy resolution was 2 eV for the Si K line.