| 基于扫描反射镜调制的调焦调平系统测试方法研究 |
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| 引用本文： | 庄亚政,齐景超,陈小娟.基于扫描反射镜调制的调焦调平系统测试方法研究[J].传感器与微系统,2017,36(10). |
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| 作者姓名： | 庄亚政 齐景超 陈小娟 |
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| 作者单位： | 1. 上海交通大学电子信息与电气工程学院,上海200030;上海微电子装备有限公司,上海201203;2. 上海微电子装备有限公司,上海,201203 |
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| 摘 要： | 针对投影光刻的特点,研究了一种基于扫描反射镜调制和三角测量原理的调焦调平系统.该系统遵循向甫鲁(SC)成像条件,并通过检测投影光斑相对于探测狭缝的位移量衡量硅片面的离焦量.同时,利用扫描反射镜的光学载波调制,提高系统的抗干扰能力.实验结果表明:系统拥有纳米(nm)级的测量精度,且具有采样频率高、非接触、多光斑布局方便等特点.
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| 关 键 词： | 调焦调平 扫描反射镜调制 纳米级测量 三角测量原理 |
Research on test method of focusing and leveling system based on scanning mirror modulation |
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| ZHUANG Ya-zheng,QI Jing-chao,CHEN Xiao-juan.Research on test method of focusing and leveling system based on scanning mirror modulation[J].Transducer and Microsystem Technology,2017,36(10). |
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| Authors: | ZHUANG Ya-zheng QI Jing-chao CHEN Xiao-juan |
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| Abstract: | The focusing and leveling system which is based on scanning mirror modulation and triangulation principle is introduced. This system follows the SCheimpflug(SC) imaging condition and measures the focal plane displacement of silicon by detecting the displacement of the projection slit spot relative to the detect slit. In order to improve the anti-jamming ability,the system uses a scanning mirror to modulate the optical signal. It is found that the system has precision of nanometer,and it has the characteristics of high sampling frequency,non-contact, and easy multiple-beam layout. |
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| Keywords: | focusing and leveling scanning mirror modulation nano-measurement triangulation principle |
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