基于多频扫描的硅微谐振压力传感器测试方法

为了对硅微谐振压力传感器进行快速、高精度的开环特性测试,提出了一种基于多频扫描的频率特性测试方法.通过数字电路将多个不同频率的扫频信号叠加作为驱动信号,以实现在整个测试频带范围内高效且高精度的频率特性测试.搭建了以现场可编程门阵列(FPGA)为核心的多频扫描测试系统,采用4个正弦扫频信号叠加进行测试,结果表明:多频扫描测试与稳态扫描测试精度基本一致,但测试效率提高了4倍.多频扫描测试方法在保证测试精度的前提下,显著提高了测试效率,能够更好地满足高Q值传感器及其在批量生产过程中的测试需求.

Testing method of silicon micro resonant pressure sensor based on multi-frequency scanning

For testing silicon micro resonant pressure sensor with high efficiency and precision,a testing method of frequency characteristics based on multi-frequency scanning is presented. Multi-frequency scanning signals are superimposed by digital circuit and act as driving signal to realize frequency characteristic measurement,with high precision and high efficiency. The multi-frequency scanning testing system with FPGA as the core part is built,and 4 sine frequency scanning signal is superimposed. The experimental result shows that the precision of multi-frequency scanning test is basically the same as steady-state scanning test,but it improves the efficiency by 4 times. The multi-frequency scanning test method can greatly improve the testing efficiency on the premise of test precision,and can meet the testing requirements of high Q value sensor as well as its mass production better.