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| 硅基底TiO2纳米管阵列的制备 | |
| 引用本文： | 杨铭杰,刘伟,孙家林.硅基底TiO2纳米管阵列的制备[J].金属功能材料,2012,19(5):6-9. |
| 作者姓名： | 杨铭杰 刘伟 孙家林 |
| 作者单位： | 1. 清华大学材料科学与工程系,北京 100084;清华大学 物理系,北京 100084 2. 清华大学材料科学与工程系,北京,100084 3. 清华大学 物理系,北京,100084 |
| 基金项目： | 国家自然科学基金资助项目(11174172) |
| 摘 要： | 本文采用磁控溅射方法在硅基底上沉积一层金属钛膜,用于取代传统阳极氧化法制备TiO2纳米管阵列所用的金属钛片.分别在乙二醇和丙三醇两种电解液中进行阳极氧化,均在硅基底上形成了高度有序的TiO2纳米管阵列.该方法与硅工艺集成技术兼容,有利于基于TiO2纳米管阵列的微纳米器件的设计和制造. |
| 关 键 词： | TiO2纳米管阵列 阳极氧化法 硅基底 磁控溅射 |
Fabrication of TiO2 Nanotube Arrays on Si Substrates |
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| YANG Ming-jie , LIU Wei , SUN Jia-Lin.Fabrication of TiO2 Nanotube Arrays on Si Substrates[J].Metallic Functional Materials,2012,19(5):6-9. | |
| Authors: | YANG Ming-jie LIU Wei SUN Jia-Lin |
| Affiliation: | 1.Department of Material Science and Engineering,Tsinghua University,Beijing 100084,China; 2.Department of Physics,Tsinghua University,Beijing 100084,China) |
| Abstract: | Titanium films deposited on Si substrates by magnetron sputtering were used instead of titanium foils in the traditional anodizing process.Highly-ordered TiO2 nanotube arrays were fabricated on Si substrates via anodization in ethylene glycol electrolyte and glycerol electrolyte,respectively.This method was compatible with silicon integration technology,which was in favor of the design and manufacture of micro-nano devices based on TiO2 nanotube arrays. |
| Keywords: | TiO2 nanotube arrays anodization Si substrates magnetron sputtering |
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