| 改良西门子法多晶硅还原新技术研究进展 |
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| 引用本文： | 曾亚龙,丁国江,廖敏. 改良西门子法多晶硅还原新技术研究进展[J]. 四川有色金属, 2009, 0(2): 1-4 |
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| 作者姓名： | 曾亚龙 丁国江 廖敏 |
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| 作者单位： | 峨嵋半导体材料厂、所,峨眉山市,614200;峨嵋半导体材料厂、所,峨眉山市,614200;峨嵋半导体材料厂、所,峨眉山市,614200 |
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| 摘 要： | 在日益激烈的国际竞争环境下，传统改良西门子法多晶厂商发展成本更低的替代技术势在必行。本文简单介绍了国外公司的三氯氢硅流化床技术和气液沉积法技术；其中三氯氢硅流化床技术能充分利用现有改良西门子法的全部产品流程，对改良西门子法多晶厂商更具参考意义。
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| 关 键 词： | 三氯氢硅 粒状多晶硅 还原 流化床 气液沉积 |
Research Progress for New Technology of Polysilicon Deoxidization Based on Improved Siemens Method |
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| ZENG Ya-long,DING Guo-jiang,LIAO min. Research Progress for New Technology of Polysilicon Deoxidization Based on Improved Siemens Method[J]. Sichuan Nonferrous Metals, 2009, 0(2): 1-4 |
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| Authors: | ZENG Ya-long DING Guo-jiang LIAO min |
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| Affiliation: | Emei Semiconductior Materials Factory;Emei;Sichuan 614200 |
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| Abstract: | In the increasingly fierce international competition,the polycrystalline manufacturers using traditional improved Siemens method must use the lower cost alternative technologies.This paper introducts trichlorosilane fluidized bed technology and gas-liquid deposition technology in foreign companies.The trichlorosilane fluidized bed technology which can make full use of all process of Siemens product is more useful to polycrystalline manufacturers using traditional improved Siemens method. |
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| Keywords: | Granular polysilicon Deoxidization Fluidized bed Gas-liquid deposition |
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