影响金刚石膜刀具涂层形貌的因素分析

采用高分辨金相显微镜对硬质合金刀生上沉各的ＣＶＤ金刚石薄膜进行了表面形貌和膜／基横截面组织形貌的观察；并利用该显微镜配备的功能测量了金刚石颗粒大小，膜厚；利用显微镜正焦／过焦观察判断了金刚石薄膜的成膜状况。初步观察结果表明：甲烷浓度和基体钴含量对金刚石薄膜的表面形貌和膜／基横截面组织形貌有显著的影响。

Application of Metallographic Techniques for Diamond Thin Film Coated Tools

The surface morphologies of chemical vapor deposited diamond thin films synthesized under different deposition conditions and the cross - sectional morphologies between diamond films and substrates have been observed using high resolution optical microscope. The grain size of diamond and the thickness of diamond film have also been measured by means of its accessories. The film state of coalescence has been judged using in - focus and out - of - focus observation method. The preliminary observation results show that the methane concentration and the cobalt content within cemented carbide insert have a significant effect on surface and cross-sectional morphologies of diamond thin films deposited on cemented carbide inserts.