| 利用变形和形貌的关系测量三维形貌的方法 |
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| 引用本文： | 黄珍献,赵瑞东,孙平.利用变形和形貌的关系测量三维形貌的方法[J].激光与光电子学进展,2011(5). |
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| 作者姓名： | 黄珍献 赵瑞东 孙平 |
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| 作者单位： | 天津商业大学理学院应用物理系;山东师范大学物理与电子科学学院; |
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| 基金项目： | 山东省自然科学基金(Y2008G18)资助课题 |
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| 摘 要： | 提出了根据变形测量和形貌测量的关系测量物体三维形貌的方法。利用电子散斑干涉(ESPI)测量物体面形时,物体偏转微小角度会引入附加的物面高度差,从而引入载波条纹。分析了物面偏转角度和附加高度差之间的关系,得出了物面相位和物面高度之间的映射关系。物面的相位由傅里叶变换法求得。对球冠面形进行了测量,实验表明,在物面上产生干涉载波条纹,进而测量物面面形,具有灵敏度高的优点。
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| 关 键 词： | 测量 电子散斑干涉 面形测量 载波 傅里叶变换 |
3-D Shape Measurement Based on Relationship Between Deformation and Shape |
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| Huang Zhenxian Zhao Ruidong Sun Ping.3-D Shape Measurement Based on Relationship Between Deformation and Shape[J].Laser & Optoelectronics Progress,2011(5). |
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| Authors: | Huang Zhenxian Zhao Ruidong Sun Ping |
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| Affiliation: | Huang Zhenxian1 Zhao Ruidong2 Sun Ping2(1Department of Applied Physics,College of Science,Tianjin University of Commerce,Tianjin 300134,China2 College of Physics and Electronic,Shandong Normal University,Jinan,Shangdong 250014,China) |
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| Abstract: | A method of shape measurement based on the relationship between displacement measurement and shape measurement is presented.When the shape of an object is measured by using electronic speckle pattern interferometry(ESPI),the test object tilting with a small angle will introduce an additional height difference and produce a carrier pattern.The relationship between the tilting angle and the additional height difference is analyzed.Then the relationship between the phase of the test object and the height of ob... |
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| Keywords: | meascnement electronic speckle pattern interferometry shape measurement carrier pattern Fourier transform |
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