| 类金刚石薄膜光学参数反演的改进遗传算法 |
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| 引用本文： | 李建超,苏俊宏,徐均琪. 类金刚石薄膜光学参数反演的改进遗传算法[J]. 激光与光电子学进展, 2011, 0(3): 6-10 |
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| 作者姓名： | 李建超 苏俊宏 徐均琪 |
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| 作者单位： | 西安工业大学光电工程学院; |
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| 摘 要： | 椭偏法测试薄膜不能直接得到薄膜的光学参数,需进行数值反演算法近似求解.采用遗传算法,借鉴竞争选择、小生境和适应值调节思想,对选择算子、变异算子、交叉算子三个重要箅子进行了适当改进,改进后算法有效防止了"早熟"现象.并搜索到了全局最优,降低了操作者对拟合模型设定初值的要求.在实践上.通过3种拟合方式的结果对比,得到了可靠...
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| 关 键 词： | 薄膜 类金刚石(DLC)薄膜 光学常数 改进遗传算法 椭偏数据反演 |
Improved Genetic Algorithm Inverted with Optical Constants of Diamond-Like Carbon Film |
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| Li Jianchao Su Junhong Xu Junqi. Improved Genetic Algorithm Inverted with Optical Constants of Diamond-Like Carbon Film[J]. Laser & Optoelectronics Progress, 2011, 0(3): 6-10 |
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| Authors: | Li Jianchao Su Junhong Xu Junqi |
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| Abstract: | Ellipsometry can not be directly tested by thin film optical parameters,which needs approximate solution method for numerical inversion.Using genetic algorithms,the selection operator,mutation operator and crossover operator are improved by drawing from competition,selection and fitness niche adjustment idea.The improved algorithm is effective in preventing the premature phenomenon.It searches the global optimal and reduces the requirements on the operator to set the initial value on the fitted model.In pra... |
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| Keywords: | films diamond-like carbon optical constants improved genetic algorithm ellipsometric data inversion |
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