| 玻璃基底上制备多孔氧化铝薄膜的研究 |
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| 引用本文： | 赵立新,薛亦渝,郭培涛,彭桦,李展望.玻璃基底上制备多孔氧化铝薄膜的研究[J].激光与光电子学进展,2011(2). |
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| 作者姓名： | 赵立新 薛亦渝 郭培涛 彭桦 李展望 |
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| 作者单位： | 武汉理工大学材料科学与工程学院;武汉理工大学汽车工程学院; |
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| 基金项目： | 中央高校基本科研业务费专项资金(2010-Ⅳ-056)资助课题 |
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| 摘 要： | 采用电子束蒸发和阳极氧化法,在B207光学玻璃基底上制备出了孔径大小可调、孔隙率可调的多孔氧化铝光学薄膜。用扫描电子显微镜(SEM)和分光光度计分别表征了薄膜的形貌和透射率。结果表明,电子束蒸发的铝膜表面质量比电抛光的铝箔表面质量差;与一次氧化法相比,二次氧化法可以显著提高膜的表面质量;与硫酸和草酸电解液相比,在磷酸电解液中制备的多孔氧化铝薄膜具有较大的孔径,更高的孔隙率;退火有利于多孔氧化铝薄膜透射率的提高。
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| 关 键 词： | 薄膜 多孔氧化铝薄膜 阳极氧化 透射率 |
Study on Fabrication of Porous Alumina Film on Glass |
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| Zhao Lixin Xue Yiyu, Guo Peitao Peng Hua Li Zhanwang.Study on Fabrication of Porous Alumina Film on Glass[J].Laser & Optoelectronics Progress,2011(2). |
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| Authors: | Zhao Lixin Xue Yiyu Guo Peitao Peng Hua Li Zhanwang |
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| Affiliation: | Zhao Lixin1 Xue Yiyu1,2 Guo Peitao2 Peng Hua1 Li Zhanwang1 |
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| Abstract: | Porous alumina optical film with controllable pore diameter,porosity and highly ordered pore arrangement is fabricated on B207 optical glass by electron-beam evaporation and anodic oxidation.The surface morphology and transmittance of the film are examined by scanning electron microscope (SEM) and the spectrophotometer,respectively.The results indicate that the surface quality of electron-beam-evaporated aluminum film is much worse than that of electrochemically polished Al foil.A two-step anodization can i... |
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| Keywords: | thin films porous anodic alumina film anodic oxidation transmittance |
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