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炭/炭复合材料化学气相沉积工艺进展
引用本文:于澍,黄启忠,黄伯云,熊翔,张传福.炭/炭复合材料化学气相沉积工艺进展[J].粉末冶金材料科学与工程,2006,11(5):262-267.
作者姓名:于澍  黄启忠  黄伯云  熊翔  张传福
作者单位:中南大学,粉末冶金国家重点实验室,长沙,410083
基金项目:国家重点基础研究发展计划(973计划)
摘    要:对多种化学气相沉积工艺进行了分析对比,指出在炭/炭复合材料的研制与开发中,以等温等压(ICVD)的工艺为最优。该工艺能很好地控制工艺参数,特别是对于装了大量异形件的高炉膛,所沉积的样件不仅密度均匀而且性能稳定,虽然其工艺周期较长,但在实际生产中,可以通过多料柱的高炉膛来降低成本,是比较成熟、稳定的生产工艺。近年来兴起的其他工艺,主要关注沉积速度和沉积机理,大多局限于实验室研究,距工业化大生产还有很大的距离。

关 键 词:炭/炭复合材料  化学气相沉积(CVD)  工艺
文章编号:1673-0224(2006)5-262-06
收稿时间:2006-04-24
修稿时间:2006-04-242006-07-11

Process development of chemistry vapor deposition for C/C composite
YU Shu,HUANG Qi-zhong,HUANG Bai-yun,XIONG Xiang,ZHANG Chuan-fu.Process development of chemistry vapor deposition for C/C composite[J].materials science and engineering of powder metallurgy,2006,11(5):262-267.
Authors:YU Shu  HUANG Qi-zhong  HUANG Bai-yun  XIONG Xiang  ZHANG Chuan-fu
Affiliation:State Key Laboratory of Powder Metallurgy, Central South University, Changsha 410083, China
Abstract:Many processes of chemistry vapor deposition(CVD) are analyzed for carbon/carbon composites manufacture.And it is pointed out that the best process of CVD is the isothermal-isobaric CVD owing to its easiest control,uniform microstructure and good property of composites,in particular owing to its good fabrication ability for abnormal parts and it can reduce production cost by using high multi-column furnace.Other processes are mainly concerned about the speed and mechanism of CVD and most of them have been researched in laboratory only.
Keywords:carbon/carbon composites  chemistry vapor deposition  process
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