Field emission from patterned carbon nanotube emitters produced by microwave plasma chemical vapor deposition

Large area carbon nanotube patterns were fabricated by microwave plasma chemical vapor deposition. The carbon nanotubes were grown on pre-patterned catalyst films. Scanning electron microscopy and Raman spectroscopy were used to characterize the structure of the carbon nanotubes. The carbon nanotubes were very uniform and approximately 100 nm in diameter. The Raman spectrum shows a good graphitization for the carbon nanotubes. Aligned growth was found on the pattern line area. Field emission characteristics of the patterns were characterized. A threshold field of 2.0 V/μm and emission current density of 1.1 mA/cm² at 3.6 V/μm were achieved. A clear and stable image showing the patterns were obtained.