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Elimination of Voids at Interface of <Emphasis Type="Italic">β</Emphasis>-SiC Films and Si Substrate by Laser CVD

引用本文：	朱佩佩,涂溶.Elimination of Voids at Interface of β-SiC Films and Si Substrate by Laser CVD[J].武汉理工大学学报(材料科学英文版),2018,33(2):356-362.

作者姓名：	朱佩佩涂溶

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