| 调制比对电弧离子镀Cr/TiN纳米多层膜力学性能的影响 |
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| 引用本文： | 吴彦超,刘豫瑶,刘洋,高晟元,黄美东. 调制比对电弧离子镀Cr/TiN纳米多层膜力学性能的影响[J]. 真空, 2021, 0(2): 10-14 |
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| 作者姓名： | 吴彦超 刘豫瑶 刘洋 高晟元 黄美东 |
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| 作者单位： | 天津师范大学 |
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| 基金项目： | 天津市大学生创新创业项目(202010065084)。 |
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| 摘 要： | 采用电弧离子镀技术,通过改变调制比沉积Cr/TiN纳米多层膜.利用扫描电子显微镜、原子力显微镜、X射线衍射仪、纳米压痕仪研究了调制比对Cr/TiN纳米多层膜表面形貌、微观结构以及力学性能的影响.结果表明,纳米多层膜表面致密、平滑均匀,膜层与基底结合良好,膜层综合力学性能优异,出现明显的纳米效应和界面效应.当调制比为2:...
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| 关 键 词： | 电弧离子镀 Cr/TiN纳米多层膜 硬度 调制比 |
Effects of Modulation Ratio on Mechanical Properties of Cr/TiN Nano-multilayers Prepared by Arc Ion Plating |
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| WU Yan-chao,LIU Yu-yao,LIU Yang,GAO Sheng-yuan,HUANG Mei-dong. Effects of Modulation Ratio on Mechanical Properties of Cr/TiN Nano-multilayers Prepared by Arc Ion Plating[J]. Vacuum(China), 2021, 0(2): 10-14 |
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| Authors: | WU Yan-chao LIU Yu-yao LIU Yang GAO Sheng-yuan HUANG Mei-dong |
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| Affiliation: | (College of Physics and Materials Science,Tianjin Normal University,Tianjin 300387,China) |
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| Abstract: | Cr/TiN nanoscale multilayers were deposited by arc ion plating with different modulation ratios.The surface morphology,microstructure,hardness and adhesion strength to the substrate of the multilayers were investigated by SEM,AFM,XRD and nano-indenter,respectively.The results show that the Cr/TiN nano-multilayers have compact microstructure with smooth surfaces and comprehensively excellent mechanical properties,indicating nano-interface effects exist in the films.The maximum hardness of 33.22 GPa was achieved as the modulation ratio of 2∶3 was applied. |
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| Keywords: | arc ion plating Cr/TiN nano-multilayers hardness modulation ratio |
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