磁控溅射制备紧固件防咬死涂层的厚度均匀性研究

为了研究磁约束聚变装置支撑装置紧固件的螺母和螺栓表面防咬死涂层的均匀性,利用磁控溅射技术在管形器件的内表面和外表面制备了铜膜,应用台阶仪进行薄膜厚度测试.采用矩形铜板作为磁控溅射靶,采用单自转和公转加自转两种方式进行沉积,分析了铜膜在管形器件的内表面和外表面的膜厚分布规律.结果表明:无论螺母还是螺栓,公转加自转相对于单...

Thickness Uniformity of Anti-Seizing Coating for Fasteners Prepared by Magnetron Sputtering

To study the uniformity of the anti-seizing coating on the surface of the nuts and bolts of the supporting devices for the magnetic confinement fusion devices, copper films were prepared on the inner and outer wall of the cylindrical device by magnetron sputtering technology. The thickness of the films was measured by the step meter. A rectangular copper block was used as the magnetron sputtering target. The single rotation and revolution plus rotation were used to deposit copper films. The film thickness distribution on the inner wall and the outer wall of the cylindrical devices was analyzed. The results show that the uniformity of the films prepared by revolution plus rotation is better than that by single rotation. The thickness of the films increases with the decrease of the pore(tube) size.