| 一种新颖的点衍射干涉轻敲模式原子力显微镜 |
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| 引用本文： | 冷炜,杨甬英,杨李茗.一种新颖的点衍射干涉轻敲模式原子力显微镜[J].光学仪器,2005,27(3):65-69. |
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| 作者姓名： | 冷炜 杨甬英 杨李茗 |
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| 作者单位： | 浙江大学现代光学仪器国家重点实验室,浙江,杭州,310027;成都精密光学工程研究中心,四川,成都,610041 |
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| 摘 要： | 论述了一种新颖的原子力显微镜,它利用硅微探针的特殊结构和相关光学系统所引起的点衍射干涉现象1]来扫描成像,因为硅微探针被用作反射型点衍射板,故光路完全共路,再结合锁相检测技术,使得该仪器抗干扰力极强且结构精巧紧凑,可适用于测试软硬不同材料样品,对软质高分子膜材料检测得到了实际的链状结构。
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| 关 键 词： | 原子力显微镜 点衍射 锁相 轻敲模式 干涉术 |
| 文章编号： | 1005-5630(2005)03-0065-05 |
| 修稿时间： | 2004年9月16日 |
A novel tapping mode atomic force microscopy using point-diffraction-interference technique |
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| LENG Wei,YANG Yong-ying,YANG Li-mingang University,Hangzhou,Chin,.Chengdu Fine Optical Engineering Research Center,Chengdu,China.A novel tapping mode atomic force microscopy using point-diffraction-interference technique[J].Optical Instruments,2005,27(3):65-69. |
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| Authors: | LENG Wei~ YANG Yong-ying~ YANG Li-ming~ang University Hangzhou Chin Chengdu Fine Optical Engineering Research Center Chengdu China |
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| Affiliation: | LENG Wei~1,YANG Yong-ying~1,YANG Li-ming~2ang University,Hangzhou 310027,China,2.Chengdu Fine Optical Engineering Research Center,Chengdu 610041,China) |
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| Abstract: | The paper introduces a novel tapping mode atomic force microscope (AFM). It ingeniously uses point-diffraction-interference effect arising from delicate structure of silicon microprobe and correlative optical system to scan sample and image. The microprobe is used as reflected point-diffraction board so the new AFM has totally common-path optical system. Additionally, by using phase-locked loop technique the new AFM has simplified structure and high anti-jamming capability. It can measure hard or soft material sample. The measure results of macromolecular film show the actually chain structure. |
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| Keywords: | AFM point-diffraction phase-locked tapping mode interference |
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