基于DBR的半导体晶圆制造生产调度研究 |
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引用本文: | 丁小进,乔非,李莉. 基于DBR的半导体晶圆制造生产调度研究[J]. 机电一体化, 2008, 0(3): 29-31,38 |
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作者姓名: | 丁小进 乔非 李莉 |
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作者单位: | 同济大学CIMS中心,上海,201804 |
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基金项目: | 基金项目:国家自然科学基金项目(No.70531020和No.60374005)和973项目子任务(No.2002CB312202)资助. |
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摘 要: | 在分析了存在重人流的半导体晶圆制造环境中实现DBR(drum buffer rope)调度难点的基础上,提出了半导体生产线的瓶颈识别算法和单产品类型制造环境下半导体生产线分层DBR调度思想;以HP24半导体生产线为模型,使用EM-PLANT软件进行仿真,验证了方案的可行性。
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关 键 词: | 约束理论 瓶颈重入流 瓶颈识别 分层DBR |
Research of DBR Scheduling Method for Semiconductor Manufacturing |
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Abstract: | DBR(drum buffer rope) theory was briefly presented,the difficulties in the production environment with re-en- trant flow was also expounded.A new scheduling method named different layers DBR scheduling for single product environ- ment is put forward.The new method proves to perform well by Em-plant emluator using HP24 module. |
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Keywords: | TOC(theory of constraints) bottle re-entrant flows bottleneck identification different layers DBR |
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