Microstructural characterization of transparent conducting aluminium doped zinc oxide films prepared by spray pyrolysis

X-ray diffraction patterns of pyrolytically sprayed aluminium doped zinc oxide films have been recorded and X-ray line profile analysis studies have been carried out after correcting for instrumental broadening. Different microstructural parameters such as crystallite size, r.m.s. strain and dislocation density have been determined from the variance analysis of X-ray line profiles. Texture coefficient, the degree of preferred orientation of the crystallites and stacking fault have been estimated from the X-ray diffraction data. It is observed that the figure of merit as a transparent conductor depends on the dopant concentration and microstructural parameters of the films deposited under identical growth conditions.