大口径半球形基底膜层均匀性的分析

针对半球面大口径球形光学元件的膜层均匀性进行了理论分析研究。通过建立半球形基底内表面的数学模型,运用膜厚理论公式表达出内表面的膜厚分布。推算了蒸发源不同位置对膜层均匀性的影响,同时对理想点源、小面源和实际蒸发特性对膜厚的影响进行了分析。该研究工作对大曲率半球膜层镀制工艺具有一定的指导意义,在改善此种表面膜层均匀性上提供了理论依据。

Analysis on Membrane Layer Uniformity of Large Diameter Hemispherical Basemen

Hemispherical surface of large caliber spherical optical element, the author of this paper film uniformity are analyzed in theory research. Through the mathematical model was established, the inner surface of the spherical basal theory of film thickness formula expresses the inner surface of the film thickness distribution. Calculate the evaporation source position influence on film uniformity,and the ideal point source,non-point source and actual evaporation charac-teristics influence on film thickness are analyzed. The research work on the large curvature hemisphere film plating pro-cess has a certain guiding significance,to improve the uniformity of surface film layer provides theory basis.