An organic catalytic CVD: Principle, apparatus and applications

Organic catalytic CVD (O-Cat-CVD) is an extension of the conventional Cat-CVD technique to organic substances. O-Cat-CVD utilizes metal-organic (MO) compounds as CVD sources and provides various types of organic-inorganic hybrid materials at low substrate temperature below 200 °C. This paper introduces the research and development (R/D) to industrialize the O-Cat-CVD and related technologies in Material Design Factory (MDF) Co., Ltd. which is the first university-based venture business company of Osaka City University. Especially, this paper describes the development of a plasma-assisted catalytic CVD apparatus and the application to the growth of various types of organic-inorganic hybrid materials on plastic film substrates at low temperature.