MEMS tunable resonant leaky mode filters |
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Authors: | Magnusson R Ding Y |
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Affiliation: | Dept. of Electr. & Comput. Eng., Connecticut Univ., Storrs, CT, USA; |
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Abstract: | A tunable double-grating resonant leaky mode microelectromechanical-type element is introduced. A significant level of tunability is demonstrated by adjusting mechanically the structural symmetry of the grating profile. Tuning is also possible by variation of the thickness of the resonant layer. For a particular example silicon-on-insulator structure treated, it is shown that the resonance wavelength can be shifted by /spl sim/300 nm with a horizontal movement of /spl sim/120 nm within the 1.4-1.7-/spl mu/m wavelength band. Additionally, the reflectance can be varied from /spl sim/10/sup -3/ to 1 at central wavelength of 1.55 /spl mu/m with a vertical movement of /spl sim/200 nm. These results demonstrate new possibilities in design of tunable optical devices. |
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