| 原子及近原子尺度制造——制造技术发展趋势 |
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| 引用本文： | 房丰洲.原子及近原子尺度制造——制造技术发展趋势[J].中国机械工程,2020,31(9):1009. |
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| 作者姓名： | 房丰洲 |
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| 作者单位： | 天津大学精密测试技术及仪器国家重点实验室，天津，300072 |
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| 基金项目： | 国家重点研发计划资助项目（2016YFB1102203）;
国家自然科学基金资助项目（61635008） |
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| 摘 要： | 探讨了制造技术发展趋势，论述了制造历史发展的三个阶段，指出原子及近原子尺度制造（ACSM）是下一代制造技术的主流发展趋势，对未来科技发展和高端元件制造具有重要意义。详细分析阐述了ACSM的主要研究内容及关键科学问题，并提出了相应的建议和措施。
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| 关 键 词： | 原子及近原子尺度 原子及近原子尺度制造 制造Ⅲ 制造技术发展趋势 |
On Atomic and Close-to-atomic Scale Manufacturing——Development Trend of Manufacturing Technology |
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| FANG Fengzhou.On Atomic and Close-to-atomic Scale Manufacturing——Development Trend of Manufacturing Technology[J].China Mechanical Engineering,2020,31(9):1009. |
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| Authors: | FANG Fengzhou |
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| Affiliation: | State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin Univeristy,Tianjin,300072 |
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| Abstract: | This paper present the manufacturing development history, described three phases of advancement in, and indicated the main trend of manufacturing development, namely, ACSM, which would be of great significance in developing future technologies and high-end components manufacturing. The ACSM main issues to be explored were discussed and the relevant suggestions and measures were who provided. |
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| Keywords: | atomic and close-to-atomic scale atomic and close-to-atomic scale manufacturing(ACSM) manufacturing Ⅲ development trend of manufacturing technology |
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