首页 | 本学科首页   官方微博 | 高级检索  
     


Inkjet printed copper source/drain metallization for amorphoussilicon thin-film transistors
Authors:Cheong Min Hong Wagner   S.
Affiliation:Motorola Inc., Austin, TX;
Abstract:Source/drain metallization to amorphous silicon thin-film transistors has been made by inkjet printing. Contact pads of a metal organic copper precursor were inkjet printed, and then converted to copper metal at a maximum process temperature of 200°C. The copper contacts were used as the mask for back-channel etch. Laser printed toner was used for all other mask levels in a photoresist-free fabrication process. The inkjet printing of copper contacts represents a further step toward an all-printed thin-film transistor technology
Keywords:
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号