| 合金薄膜电阻应变式压力传感器的研究进展 |
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| 引用本文： | 晏建武,周继承,鲁世强,田莉. 合金薄膜电阻应变式压力传感器的研究进展[J]. 材料导报, 2005, 19(12): 31-34 |
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| 作者姓名： | 晏建武 周继承 鲁世强 田莉 |
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| 作者单位： | 中南大学物理科学与技术学院,长沙,410083;南昌航空工业学院材料科学与工程系,南昌,330034;中南大学物理科学与技术学院,长沙,410083;南昌航空工业学院材料科学与工程系,南昌,330034 |
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| 摘 要： | 综述了合金薄膜应变压力传感器的现状、发展趋势、技术关键及应用情况.合金敏感薄膜电阻在应变压?技 力传感器上的应用克服了粘贴式应变压力传感的缺点,使压力传感器结构更精细,性能更优越,适应各种恶劣环境测量压力的要求.
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| 关 键 词： | 合金薄膜 压力传感器 进展 |
Development and Investigation Trends of Alloy Thin Film Piezoresistive Sensor |
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| YAN Jianwu,ZHOU Jicheng,LU Shiqiang,TIAN Li. Development and Investigation Trends of Alloy Thin Film Piezoresistive Sensor[J]. Materials Review, 2005, 19(12): 31-34 |
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| Authors: | YAN Jianwu ZHOU Jicheng LU Shiqiang TIAN Li |
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| Affiliation: | 1, School of Physics Science and Technology,Central South University,Changsha 410083; 2, Department of Mater. Sci. and Eng. , Nanchang Institute of Aeronautical Technology, Nanchang 330034 |
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| Abstract: | In this article, the status and development trend, the key technology and the application of alloy thin film piezoresistive sensor are reviewed. The use of alloy thin film resistor as sensitive layer in piezoresistive sensor overcomesthe shortcoming of stickup pressure sensor. Due to their more elaborate structure and superior properties, alloy thin film piezoresistive sensor can be used in all kinds of harsh environments. |
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| Keywords: | alloy thin film piezoresistive sensor development |
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