| TEM STUDY ON LOCALIZED RECRYSTALLIZATION SOI |
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| 引用本文： | Liu Ansheng,Shao Beiling,Li Yonghong,Liu Zheng General Research Institute for Non ferrous Metals,Beijing 100088 Zhang Pengfei,Tsien Peixin Institute of Microelectronics,Tsinghua University,Beijing 100084. TEM STUDY ON LOCALIZED RECRYSTALLIZATION SOI[J]. 中国有色金属学会会刊, 1997, 0(1) |
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| 作者姓名： | Liu Ansheng Shao Beiling Li Yonghong Liu Zheng General Research Institute for Non ferrous Metals Beijing 100088 Zhang Pengfei Tsien Peixin Institute of Microelectronics Tsinghua University Beijing 100084 |
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| 作者单位： | Liu Ansheng，Shao Beiling，Li Yonghong，Liu Zheng General Research Institute for Non ferrous Metals，Beijing 100088 Zhang Pengfei，Tsien Peixin Institute of Microelectronics，Tsinghua University，Beijing 100084 |
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| 摘 要： | ＴＥＭＳＴＵＤＹＯＮＬＯＣＡＬＩＺＥＤＲＥＣＲＹＳＴＡＬＬＩＺＡＴＩＯＮＳＯＩ①ＬｉｕＡｎｓｈｅｎｇ，ＳｈａｏＢｅｉｌｉｎｇ，ＬｉＹｏｎｇｈｏｎｇ，ＬｉｕＺｈｅｎｇＧｅｎｅｒａｌＲｅｓｅａｒｃｈＩｎｓｔｉｔｕｔｅｆｏｒＮｏｎｆｅｒｒｏｕｓＭｅｔａｌ...
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TEM STUDY ON LOCALIZED RECRYSTALLIZATION SOI |
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| Liu Ansheng,Shao Beiling,Li Yonghong,Liu Zheng General Research Institute for Non ferrous Metals,Beijing Zhang Pengfei,Tsien Peixin Institute of Microelectronics,Tsinghua University,Beijing. TEM STUDY ON LOCALIZED RECRYSTALLIZATION SOI[J]. Transactions of Nonferrous Metals Society of China, 1997, 0(1) |
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| Authors: | Liu Ansheng Shao Beiling Li Yonghong Liu Zheng General Research Institute for Non ferrous Metals Beijing Zhang Pengfei Tsien Peixin Institute of Microelectronics Tsinghua University Beijing |
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| Affiliation: | Liu Ansheng,Shao Beiling,Li Yonghong,Liu Zheng General Research Institute for Non ferrous Metals,Beijing 100088 Zhang Pengfei,Tsien Peixin Institute of Microelectronics,Tsinghua University,Beijing 100084 |
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| Abstract: | |
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| Keywords: | SOI(silicon on insulator) localized recrystallization crystallographic orientations characters defects TEM |
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