| 离子氮化-PECVD复合处理沉积TiCN薄膜的性能研究 |
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| 引用本文： | 刘红梅,潘应君,王自荣.离子氮化-PECVD复合处理沉积TiCN薄膜的性能研究[J].工具技术,2008,42(2):18-20. |
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| 作者姓名： | 刘红梅 潘应君 王自荣 |
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| 作者单位： | 武汉科技大学,430081,武汉市;武汉科技大学,430081,武汉市;武汉科技大学,430081,武汉市 |
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| 摘 要： | 采用离子氮化及等离子体增强化学气相沉积复合处理方法在高速钢W18Cr4V基体上沉积TiCN涂层,即在沉积之前先对试样进行氮化处理。以金属有机物钛酸丙酯化学式(C3H7O)4Ti]作为钛源沉积TiCN薄膜,并对最佳工艺条件下制备的薄膜进行了组织与物相观察、截面显微硬度测验、氧化试验以及耐磨试验。结果显示:经过复合处理的试样具有较平缓的截面硬度梯度、高的抗氧化性能(涂层在600℃以下具有良好的抗氧化性)和较好的耐磨性。
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| 关 键 词： | PCVD 离子氮化 TiCN |
| 收稿时间： | 2007-07 |
| 修稿时间： | 2007年7月1日 |
Property of TiCN Film Coated by Prior Plasma Nitriding and PECVD Multi-treatment |
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| Liu Hongmei,Pan Yingjun,Wang Zirong.Property of TiCN Film Coated by Prior Plasma Nitriding and PECVD Multi-treatment[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),2008,42(2):18-20. |
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| Authors: | Liu Hongmei Pan Yingjun Wang Zirong |
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| Abstract: | The TiCN films are coated on high-speed steel W18Cr4V by the plasma nitrogen and PECVD multi-treatment. Before the deposition process, the substrates are treated by plasma nitrogen. Using organic-metallic compound TPT(C 3H 7O) 4Ti] as the source of Ti., the films coated under the optimum technology are investigated throng a series of tests ,such as XRD,hardness lest,oxidation resistance test and wear resistance test and so on. The results show that the substrates coated by multi-treatment have a easy cross-hardness gradient and the better wear resistance, and the high oxidation resistance. |
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| Keywords: | PCVD plasma nitrogen TiCN |
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