基于无线MEMS传感器的晶圆传输振动监测系统设计

如何对半导体工厂运行中的晶圆传输设备进行监测也成为半导体厂商面临的主要问题之一。针对现有晶圆传输的振动监测问题，结合MEMS传感器和无线传输特点，提出了基于无线MEMS加速度传感器的晶圆传输过程的振动监测系统。系统以MEMS电容式加速度传感器为测试载体采集振动数据，通过蓝牙无线传感器网络将采集到的数据传输到主服务器，在监控PC上实时显示和处理，从而获得晶圆传输过程的振动信息。最后通过仿真验证可得，采用MEMS传感器可以满足轻负载的晶圆传输过程的测试需求，而且采用蓝牙无线传输方式也可以避免监测系统中的布线复杂，成本高等不足。系统实现了半导体工厂中的晶圆传输全过程的在线实时监测，可以及早发现生产线中设备的故障。

Design of vibration monitoring system for wafer transmission based on wireless MEMS sensor

A vibration monitoring system of wafer transmission is designed. Taking the MEMS capacitive acceleration sensor as test vector to collect vibration data,and the Bluetooth wireless sensor networks( WSNs)is used to transmit the signal data to host computer,on monitoring computer,data processing and real-time display can be completed. The MEMS sensor can meet the light load test requirement of wafer transmission process,and using of the Bluetooth mode can avoid drawbacks of complex wiring,high cost in vibration monitoring system. With the help of the vibration system,online real-time supervision of wafer transmission in semiconductor factory can be realized,and the breakdown can be detected early.