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微构件拉伸测试辅助引导对中测量系统设计
引用本文:杨恩臻,王标,宁晓旭,王永红.微构件拉伸测试辅助引导对中测量系统设计[J].计量学报,2017,38(6):671-675.
作者姓名:杨恩臻  王标  宁晓旭  王永红
作者单位:合肥工业大学 仪器科学与光电工程学院, 安徽 合肥 230009
基金项目:国家自然科学基金(51305120,51375136); 国家科技支撑计划资助项目(2011BAK15B07)
摘    要:设计了一套微构件拉伸测试辅助引导对中测量系统,该系统以激光准直特性为基础并结合折反射定律,采用正交二维相机获得包含平移和角偏移的激光光点图像信息,建立了二维位移和二维角偏移与激光器成像点变化的数学模型。搭建了实验平台,依据该模型,利用MATLAB对获取图像进行处理获得需要调整的二维平移和角偏移参数变量。实验结果表明,该测量系统的二维角偏移分辨率可达到0.001°,重复性优于0.02°;二维位移分辨率可达到亚微米,重复性优于10μm。可为微构件拉伸测试中辅助引导对中提供调整参数并提高拉伸测试数据的准确性。

关 键 词:计量学  引导对中  角偏移  微位移  激光准直  微构件  
收稿时间:2015-12-25

A Design of Auxiliary Alignment Measuring System for Micro Component Tension
YANG En-zhen,WANG Biao,NING Xiao-xu,WANG Yong-hong.A Design of Auxiliary Alignment Measuring System for Micro Component Tension[J].Acta Metrologica Sinica,2017,38(6):671-675.
Authors:YANG En-zhen  WANG Biao  NING Xiao-xu  WANG Yong-hong
Affiliation:School of Instrument Science and Opto-electric Engineering, Hefei University of Technology, Hefei, Anhui 230009, China
Abstract:An auxiliary alignment measuring system for micro component tensile test is designed. Based on laser collimation features with light refraction law and reflection law combined, the image information of laser spot including displacement and angle deviator can be obtained by orthogonal two dimensional camera. The mathematical model of the two-dimensional displacement and angle deviator and the laser image point changes is established as well as the experimental platform. On the basis of this model, the adjustable parameter variables of two-dimensional displacement and angle deviator can be acquired after processing the obtained images by MATLAB. The results of the test indicate that the two-dimensional angle deviator resolution can reach 0.001° and the repetitiveness is superior to 0.02°; the two-dimensional displacement resolution can reach submicron and the repetitiveness is superior to 10 μm. This measuring system is proved to be able to provide parameter adjustment for auxiliary guiding alignment and improve the accuracy of the tensile testing data in micro component tensile test.
Keywords:metrology  guided alignment  angle deviator  micro displacement  laser collimation  micro component  
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