基于MEMS加速度传感器的位移检测系统

为了实现对物体运动位移的检测,设计了一种以国产高精度MEMS电容式加速度传感器MSCA3002为核心,24位高精度A/D转换器ADS1255,高性能ARM处理器LM3S2B93为主控制器的位移检测系统,并详细给出该系统的硬件电路及其软件算法设计。系统将传感器检测到的物体运动的加速度,经过积分算法转换为物体运动位移。实验结果表明：系统采样精度高、速度快、误差小,A/D转换器对加速度信号的检测精度能达到0.4%,积分后对位移的测量精度能控制在3%左右,很好地实现了对运动位移的检测。

Displacement detecting system based on MEMS acceleration sensor

In order to realize detection of motion displacement of objects,a displacement detection system is designed,which uses domestic capacitive MEMS acceleration sensor MSCA3002 as a core,24-bit high precision A /D converter ADSl255 and ARM processor LM3S2B93 as main controller.The hardware circuit and software algorithm design of the system are introduced in detail.The acceleration detected by sensor is transformed to motion displacement of object through integral algorithm.The experimental results show that the system has high sampling precision,high sampling rate and small error,detection precision of A /D converter to acceleration signal can reach 0.4 %,and displacement measurement precision can be controlled around 3 % after integral,which realizes detection of motion displacement very well.