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基于SU-8聚合物波导的多模干涉型RGB合波器
引用本文:刘帆,隋国荣.基于SU-8聚合物波导的多模干涉型RGB合波器[J].光学仪器,2021,43(3):9-15.
作者姓名:刘帆  隋国荣
作者单位:上海理工大学 光电信息与计算机工程学院,上海 200093
摘    要:针对现有的RGB合波器分立元件多、结构复杂、成本高等问题,同时为了满足器件的微型化发展和高效率传输的需求,设计了一种基于SU-8聚合物波导的多模干涉型(MMI)RGB合波器.该合波器通过2个级联的2×1MMI对RGB三个波长进行组合,第一级MMI使R(660 nm)、B(440 nm)光束进行组合输出,第二级MMI使R...

关 键 词:RGB合波器  SU-8聚合物  多模干涉  微型显示
收稿时间:2021/1/22 0:00:00

Multi-mode interference type RGB beam combiner based on SU-8 polymer waveguide
LIU Fan,SUI Guorong.Multi-mode interference type RGB beam combiner based on SU-8 polymer waveguide[J].Optical Instruments,2021,43(3):9-15.
Authors:LIU Fan  SUI Guorong
Affiliation:School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
Abstract:In order to meet the needs of device miniaturization and high transmission efficiency, a kind of multi-mode interferometric (MMI) RGB beam combiner based on SU-8 polymer waveguide was proposed. The feasibility of the RGB beam combiner was verified by three-dimensional beam propagation simulation. The RGB beam combiner combined the three wavelengths of RGB through two cascaded 2×1 MMI. The first stage MMI output combined R (660 nm) and B (440 nm) beams, and the second stage MMI output R, B combined beams with G (550 nm) beam. By optimizing the device structure, the final results showed that the average transmission efficiency of the three working wavelengths of RGB reached 94.02%, and the size was reduced to 0.04 mm×3.60 mm. In addition, larger processing tolerance and smaller wavelength dependence were obtained. This design has the advantages of simple structure, easy integration, and miniaturization of device size and high transmission efficiency for all three working wavelengths. It can provide a reference for further research on micro display devices in the future.
Keywords:RGB beam combiner  SU-8 polymer  multi-mode interference  micro display
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