| 二氧化钒薄膜制备工艺及其在开关器件的应用研究进展 |
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| 引用本文： | 王晨,王承浩,王琦,成丁尔,张大伟. 二氧化钒薄膜制备工艺及其在开关器件的应用研究进展[J]. 光学仪器, 2021, 43(3): 78-85,94 |
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| 作者姓名： | 王晨 王承浩 王琦 成丁尔 张大伟 |
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| 作者单位： | 上海理工大学 光电信息与计算机工程学院,上海 200093;上海理工大学 光电信息与计算机工程学院,上海 200093;上海理工大学 上海市现代光学系统重点实验室,上海 200093;上海理工大学 教育部光学仪器与系统工程研究中心,上海 200093 |
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| 摘 要： | 二氧化钒薄膜由于其相变特性在多个不同领域中被广泛研究.针对其在开关器件方面的应用,介绍了近年来国内外常见的二氧化钒薄膜制备工艺研究进展并比较其优缺点,同时从不同二氧化钒相变的外部激励机制对国内外基于二氧化钒研发的开关器件进行了介绍,以期为今后的二氧化钒相变开关的研究提供参考.
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| 关 键 词： | 薄膜 二氧化钒 开关器件 相变特性 |
| 收稿时间： | 2020-12-01 |
Research progress on preparation of vanadium dioxide thin films and applications of modulators and switches |
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| WANG Chen,WANG Chenghao,WANG Qi,CHENG Dinger,ZHANG Dawei. Research progress on preparation of vanadium dioxide thin films and applications of modulators and switches[J]. Optical Instruments, 2021, 43(3): 78-85,94 |
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| Authors: | WANG Chen WANG Chenghao WANG Qi CHENG Dinger ZHANG Dawei |
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| Affiliation: | School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China;School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China;Shanghai Key Laboratory of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China;Engineering Research Center of Optical Instruments and Systems (MOE), University of Shanghai for Science and Technology, Shanghai 200093, China |
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| Abstract: | Vanadium dioxide thin films have been widely studied in many different fields due to their phase transition characteristics. Aiming at its application in switching devices, the research progress of common vanadium dioxide thin films at home and abroad in recent years is introduced and their advantages and disadvantages are discussed. At the same time, from the perspective of vanadium dioxide phase change caused by different external excitations, the switch devices developed based on vanadium dioxide at home and abroad are introduced in order to provide a reference for future research on vanadium dioxide phase change switches. |
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| Keywords: | thin film vanadium dioxide switching device phase transition characteristics |
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