| 射频/微波MEMS Shunt开关的开启时间研究 |
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| 引用本文： | 龙永福,朱自强,赖宗声,郭方敏,石艳玲. 射频/微波MEMS Shunt开关的开启时间研究[J]. 电子学报, 2002, 30(8): 1204-1206 |
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| 作者姓名： | 龙永福 朱自强 赖宗声 郭方敏 石艳玲 |
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| 作者单位： | 1. 华东师范大学电子系,上海 200062;2. 常德师范学院物理系,湖南常德 415000 |
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| 基金项目： | 国家重点基础研究规划项目 (973) (No .G1 9990 331 0 5)，国家自然科学基金 (No.698760 1 2 )，国家杰出青年基金 (No .6992 540 9)，上海市重点学科项目 (2 0 0 1年 ) |
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| 摘 要： | 本文描述了射频／微波MEMS shunt开关的理论模型和数值结论.把可动薄膜的运动近似地模拟为作用在可动薄膜上的变静电力、弹力及空气阻力的单自由度阻尼振动.给出了典型MEMS shunt开关开启时间的数学表达式及数值计算值.根据可动膜厚、材料和几何结构参数不同,得到了典型的MEMS shunt开关的开启时间大约为1~40 μs.其计算值同文献[4]的值相符得很好.本文还讨论了该理论模型和数值计算的局限性.
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| 关 键 词： | MEMS开关 开启时间 理论模型 数值计算 |
| 文章编号： | 0372-2112(2002)08-1204-03 |
| 收稿时间： | 2001-09-10 |
Study on Switching Times of RF/Microwave MEMS Shunt Switches |
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| LONG Yong-fu ,,ZHU Zi-qiang ,LAI Zong-sheng ,GUO Fang-min ,SHI Yan-ling. Study on Switching Times of RF/Microwave MEMS Shunt Switches[J]. Acta Electronica Sinica, 2002, 30(8): 1204-1206 |
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| Authors: | LONG Yong-fu ZHU Zi-qiang LAI Zong-sheng GUO Fang-min SHI Yan-ling |
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| Affiliation: | 1. Dept.of E.E.,East China Normal University,Shanghai 200062,China;2. Dept.of Physics,Chang De Normal University,Changde,Hunan 415000,China |
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| Abstract: | This paper presents the modeling and numeric calculations of a radio frequency(RF)/microwave MEMS shunt switch.The movement behavior of the movable membrane is taken as a single directional damped oscillation under an electrostatic force,an elastic recovery force and a drag force in the air.A set of mathematic formula and calculated results are given for a typical MEMS shunt switch.The calculated switching times for typical MEMS shunt switches are about 1~40μs,depending on the thickness of the membrane,constitutive materials and structure parameters.The obtained results are well agreed with the reported experimental ones .Finally,The limitations about the modeling and numerical calculations are discussed. |
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| Keywords: | MEMS switch switching time theory modeling numeric calculations |
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