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Improving dimensional measurement from noisy atomic force microscopy images by non‐local means filtering |
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| Authors: | Yuhang Chen |
| Affiliation: | Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui, P. R. China |
| Abstract: | |
| Keywords: | dimensional measurement non‐local means filtering atomic force microscopy surface nanometrology |