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Characterization study on machining PMMA thin‐film using AFM tip‐based dynamic plowing lithography |
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| Authors: | Yongda Yan Yang He Yanquan Geng Zhenjiang Hu Xuesen Zhao |
| Affiliation: | 1. Key Laboratory of Micro‐Systems and Micro‐Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin, Heilongjiang, P. R. China;2. Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang, P. R. China |
| Abstract: | |
| Keywords: | atomic force microscope dynamic plowing lithography poly(methyl methacrylate) (PMMA) film |