不同电镀参数组合对电镀填孔效果影响研究

电镀填孔存在填孔爆发期,即在填孔爆发期内盲孔底部和面铜的电沉积速率之比逐渐达到最大值,其中电流密度对填孔爆发期以及爆发前后盲孔内外铜层的电沉积速率变化有较大影响,若能了解其规律可帮助优化电镀参数,以期望缩短电镀填孔时间,获得较好填孔效果。在不同电流密度及盲孔孔径下,电镀填孔不同时期(初始期、爆发期、末期)持续时间以及填孔过程中盲孔底部、面铜电沉积速率的变化规律,并在不同填孔时间段内使用不同电镀参数进行电镀填孔。研究表明:在电镀填孔不同时期采用不同电镀参数组合,能缩短电镀填孔时间,获得较好盲孔填平效果。

The study on the influence of different plating parameter in microvia filling plating

Microvia filling exist explosion steps,the proportion of the electrical deposition rate of the bottom of micro-via and the surface reached the maximum in it,the current density have a important effect on the electrical deposition rate of the bottom and the surface.If we know the electrical deposition rate in the explosion steps,we can use it to optimize the plating parameter,shorten the plating time,finally have a better microvia filling.The duration of different periods in via filling process and the elect...