| 一种新的光学临近校正方法 |
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| 引用本文： | 李卓远,吴为民,王旸,洪先龙. 一种新的光学临近校正方法[J]. 半导体学报, 2003, 24(12): 1266-1271 |
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| 作者姓名： | 李卓远 吴为民 王旸 洪先龙 |
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| 作者单位： | 清华大学计算机科学与技术系,北京,100084;清华大学计算机科学与技术系,北京,100084;清华大学计算机科学与技术系,北京,100084;清华大学计算机科学与技术系,北京,100084 |
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| 基金项目： | 清华大学校科研和教改项目;; |
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| 摘 要： | 提出了一种新的光学临近矫正算法.首先建立了一套高效并且适用性强的规则描述,然后提出了一种新的规则运用方法.算法在规则数据表的基础上通过v- SVR方法建立规则描述同矫正数据之间的数学表达式,使得对于任意输入的规则描述都能够精确计算出相应的矫正数据.实验结果表明,该算法比传统的查表插值方法具有更高的精度.
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| 关 键 词： | 基于规则 v-SVR 光学临近校正 |
An Efficient Approach to Rules-Based Optical Proximity Correction |
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| Li Zhuoyuan,Wu Weimin,Wang Yang,Hong Xianlong. An Efficient Approach to Rules-Based Optical Proximity Correction[J]. Chinese Journal of Semiconductors, 2003, 24(12): 1266-1271 |
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| Authors: | Li Zhuoyuan Wu Weimin Wang Yang Hong Xianlong |
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| Abstract: | A new approach for rules-based optical proximity correction is presented.The discussion addresses on how to select and construct more concise and practical rules-base as well as how to apply that rules-base.Based on those ideas,several primary rules are suggested.The v-support vector regression method is used to generate a mathematical expression according to rule data.It enables to make correction according to any given rules parameters.Experimental results demonstrate applying rules calculated from the expression match well with that from the rule table. |
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| Keywords: | rules-base v-support vector regression OPC |
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