|
|||||
|
|
| X射线光刻和剥离技术制作声表面波叉指换能器 | |
| 引用本文： | 李晶晶,赵以贵,贾锐,李冬梅,牛洁斌,柯导明,陈军宁.X射线光刻和剥离技术制作声表面波叉指换能器[J].微细加工技术,2008(6). |
| 作者姓名： | 李晶晶 赵以贵 贾锐 李冬梅 牛洁斌 柯导明 陈军宁 |
| 作者单位： | 1. 中国科学院微电子研究所,纳米加工与新器件集成实验室,北京,100029;安徽大学电子科学与技术学院,合肥,230039 2. 中国科学院微电子研究所,纳米加工与新器件集成实验室,北京,100029 3. 安徽大学电子科学与技术学院,合肥,230039 |
| 基金项目： | 国家重点基础研究发展规划(973计划)，联合国资助项目，国家自然科学基金 |
| 摘 要： | 提供了采用电子束光刻、X射线光刻和金属剥离技术制作亚微米尺寸的声表面波叉指换能器的方法.首先利用电子束光刻和微电镀技术制作x射线光刻的掩模,然后利用X射线光刻和剥离技术高效地制作大面积、纳米尺电、电极陡直均匀的叉指换能器.制备出的叉指电极特征尺寸为600 nm,面积为4 mm×6 mm,断指率小于3‰,可应用于高频声表面波器件中.研究结果表明,X射线光刻结合剥离技术是一种制备高频SAW器件的优良方法. |
| 关 键 词： | 声表面波器件 叉指换能器 X射线光刻 电子束光刻 剥离 |
Fabrication of SAW Interdigitated Transducer by X-ray Lithography and Metal Lift-off |
|
| LI Jing-jing,ZHAO Yi-gui,JIA Rui,LI Dong-mei,NIU Jie-bin,KE Dao-ming,CHEN Jun-ning.Fabrication of SAW Interdigitated Transducer by X-ray Lithography and Metal Lift-off[J].Microfabrication Technology,2008(6). | |
| Authors: | LI Jing-jing ZHAO Yi-gui JIA Rui LI Dong-mei NIU Jie-bin KE Dao-ming CHEN Jun-ning |
| Affiliation: | LI Jing-jing1,2,ZHAO Yi-gui1,JIA Rui1,LI Dong-mei1,NIU Jiebin1,KE Dao-ming2,CHEN Jun-ning2(1.Key Lab of Nano-fabrication , Novel Devices Integrated Technology,Institute of Microelectronics,Chinese Academyof Sciences,Beijing 100029,China,2.School of Electronic Science , Technology,Anhui University,Hefei 230039,China) |
| Abstract: | With the surface acoustic wave(SAW) devices migrate to higher frequency and higher performance,requirements for the quality of interdigitated transducer(IDT) are growing.A submicron-scale SAW IDT fabricated by electron beam lithography(EBL),X-ray lithography(XRL) and metal lift-off was presented.In the processes,the mask with IDT structures was patterned by EBL and electroplating,Then the large area IDTs with nano-scale resolution and vertical cross sections were fabricated by XRL and metal lift-off efficie... |
| Keywords: | SAW device IDT X-ray lithography electron beam lithography lift-off |
| 本文献已被 CNKI 万方数据 等数据库收录！ | |