| Amorphous Silicon 16—bit Array Photodetector |
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| 作者单位： | Huazhong University of Science and Technolopy，Wuhan 430074，CHN |
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| 摘 要： |
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Amorphous Silicon 16 - bit Array Photodetector |
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| ZHANG Shaoqiang,XU Zhongyang,ZOU Xuecheng,WANG Changan,ZHOU Xuemei,ZHAO Bofang. Amorphous Silicon 16 - bit Array Photodetector[J]. Semiconductor Photonics and Technology, 1997, 0(1) |
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| Authors: | ZHANG Shaoqiang XU Zhongyang ZOU Xuecheng WANG Changan ZHOU Xuemei ZHAO Bofang |
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| Abstract: | Abstract: An amorphous silicon 16 - bit array photodetector with the a - SiC/a -Si heterojunction diode is presented. The fabrication processes of the device were studied systematically. By the optimum of the diode structure and the preparation procedures, the diode with Id< 10 -12 A/mm2 and photocurrent Ip^0.35 A/W has been obtained at the wavelength of 632 nm. |
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| Keywords: | Amorphous Semiconductor Photodetector Semiconductor Technology |
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