纳米多层膜制备概述

纳米多层膜具有很多特殊性能，得到了广泛的应用。阐述了多种纳米多层膜的制备方法，主要包括电化学沉积法、物理和化学气相沉积法、溶胶-凝胶法、组装技术以及其它制备技术。大量研究和试验表明，不同的制备方法得到的多层膜具有其特殊的性能。

Overview of Preparing Process of Nano Multilayers Films

Nano multilayers films have been widely used in many fields because of their excellent properties. In this paper, the ways used to preparing the nano multilayers are systematically summarized, including electro-deposition, PVD and CVD, sol-gel, self-assembly and other technologies. Many researches and experiments show that some special properties of nano multilayers can be obtained by different preparing process.