基于MEMS的硅微压阻式加速度传感器设计

硅微加速度传感器是MEMS器件中的一个重要分支，具有十分广阔的应用前景。由于硅微加速度传感器具有响应快、灵敏度高、精度高、易于小型化等优点，而且该种传感器在强辐射作用下能正常工作，因而在近年来发展迅速。文章首先对传感器结构及工作原理进行了简单介绍，给出了一种基于MEMS技术制作的压阻式硅微加速度传感器的结构和工艺，并对制作的加速度传感器样品进行了动态测试，测试结果表明与理论设计值基本吻合。

MEMS-based Micro-silicon Piezoresistive Accelerometer Design

Silicon Micro Devices MEMS accelerometer is an important branch, with a wide range of applications. As the silicon micro-accelerometer has a fast response, high sensitivity, high precision, easy-to-small size, etc., and the kind of strong radiation sensors able to work under, it developed rapidly in recent years. The article first sensor structure and working principle was simple, given based on MEMS technology produced by the piezoresistive silicon micro-accelerometer on the structure and process, and prod...