Diagonal in space of coordinate measuring machine verification using an optical-comb pulsed interferometer with a ball-lens target |
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| Affiliation: | 1. Department of Precision Engineering, The University of Tokyo, Hongo 7-3-1, Bunkyo-ku, Tokyo 113-8656, Japan;2. Research Center for Advanced Science and Technology, The University of Tokyo, Komaba 4-6-1, Meguro, Tokyo 153-8904, Japan;1. State Key Lab of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China;2. The Key Laboratory on Adaptive Optics, Chinese Academy of Sciences, Chengdu 610209, China;1. Research Center for Ultra-Precision Science and Technology, Osaka University, Japan;2. Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Japan;1. Photonics Laboratory, Department of Electronics & Instrumentation Engineering, Institute of Engineering & Technology, Devi Ahilya University, Khandwa Road, Indore 452001, India;2. Niigata University, Faculty of Engineering, Department of Electrical and Electronics Engineering, 8050 Ikarashi 2, Niigata-shi, Niigata 9502181, Japan |
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| Abstract: | This paper presents a new optical method of coordinate measuring machine (CMM) verification. The proposed system based on a single-mode fiber optical-comb pulsed interferometer with a ball lens of refractive index 2 employed as the target. The target can be used for absolute-length measurements in all directions. The laser source is an optical frequency comb, whose repetition rate is stabilized by a rubidium frequency standard. The measurement range is confirmed to be up to 10 m. The diagonals of a CMM are easier to verify by the proposed method than by the conventional artifact test method. The measurement uncertainty of the proposed method is also smaller than that of the conventional method because the proposed measurement system is less affected by air temperature; it achieves an uncertainty of approximately 7 μm for measuring lengths of 10 m. The experimental results show that the measurement accuracy depends on noise in the interference fringe, which arises from airflow fluctuations and mechanical vibrations. |
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| Keywords: | Optical comb Pulsed interferometer Length measurement Coordinate measuring machine CMM verification |
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