Calibration for the sensitivity of multi-beam angle sensor using cylindrical plano-convex lens |
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| Affiliation: | 1. Faculty of Engineering, Department of Precision Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan;2. Research Center for Advanced Science and Technology, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8904, Japan;1. CERN, European Organization for Nuclear Research, CH-1211 Geneva 23, Switzerland;2. Laboratore de l’Accelerateur Lineaire (LAL), Universite Paris Sud Orsay, Orsay, France;3. INFN Sezione di Ferrara and departamento di Fisica e Scienze della Terra, Universita di Ferrara, Via Sarogat 1 Blocco C, 44121 Ferrara, Italy;4. INFN, LNF, Via Fermi, 40 00044 Frascati (Roma), Italy;5. INFN Sezione di Roma, Piazzale Aldo Moro 2, 00185 Rome, Italy;6. INFN Sezione di Napoli, Italy;7. NRC Kurchatov Institute – IHEP, 142281 Protvino, Russia;8. Joint Institute for Nuclear Research, Joliot-Curie 6, 141980 Dubna, Russia;9. Petersburg Nuclear Physics Institute in National Research Centre “Kurchatov Institute”, 188300 Gatchina, Russia;10. Imperial College, London, United Kingdom;1. School of Physical Electronics, University of Electronic Science and Technology of China, Chengdu 610054, China;2. Institute of Applied Electronics, China Academy of Engineering Physics, Mianyang 621900, China;3. Key Laboratory of High Energy Laser, CAEP, Mianyang 621900, China |
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| Abstract: | A highly sensitive and compact multi-beam angle sensor (MBAS), which utilizes the principle of operation of an autocollimator, was developed to detect the differential of the local slope components (angle difference) of a point on the mirror surface and using Fourier series, we can obtain the profile data from the angle difference. In order to investigate the application of the MBAS for high precision aspheric surface measurements, two types of calibration methods using plane mirror and cylindrical plano-convex lens has been proposed to measure the sensitivity of the MBAS. The calibration data analysis results using plane mirror agree well with the measurement results of the cylindrical plano-convex lens data. Comparison of the two methods confirms that the second method (using cylindrical plano-convex lens) is more adapted for measurement with ultra high level of uncertainty. Further, the second method is simple, corresponding to a direct calculate in the sensitive parameters aiming to minimize the cost. |
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| Keywords: | Autocollimator Calibration Sensitivity Cylindrical plano-convex lens Multi-beam angle sensor |
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