Curved drilling via inner hole laser reflection |
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| Affiliation: | 1. State Key Laboratory of Precision Spectroscopy, School of Physics and Materials Science, East China Normal University, Shanghai 200062, China;2. XXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China;3. State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China;4. Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan, Shanxi 030006, China;1. Department of Laser and Electron Beam Applications, Korea Institute of Machinery & Materials (KIMM), Daejeon, South Korea;2. Department of Nano-Mechatronics, Korea University of Science and Technology (UST), Daejeon, South Korea;3. Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, South Korea |
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| Abstract: | In this paper, we describe curved hole drilling via the reflection of a laser beam off the sidewall of the drilled hole. A slightly offset laser beam forms a tilted surface at the bottom of the hole, controlling the angle of curvature. An ultraviolet laser beam operating at a wavelength of 266 nm was used. To visualize the hole formation process, borosilicate glass was used as the laser workpiece. This method was able to drill a curved hole with an average angle of ～3° with curvature beginning at a depth of 400–600 μm. A curved hole with a diameter of <50 μm was achieved. A branched hole was also demonstrated by using the reflection of the tilted sidewall. The curved hole formation process was recorded with a high speed camera. Once the ablated sidewall reached a certain depth, drilling ceased as the laser energy fell below the ablation threshold. Ultimately, judicious selection of an appropriate laser fluence and sidewall angle allow the formation of curved holes. |
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| Keywords: | Curved hole Laser drilling Borosilicate glass High-aspect-ratio hole |
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