| CVD金刚石膜X射线探测器的研制及性能研究 |
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| 引用本文： | 刘健敏,夏义本,王林军,张明龙,苏青峰,史伟民.CVD金刚石膜X射线探测器的研制及性能研究[J].核电子学与探测技术,2006,26(5):669-672. |
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| 作者姓名： | 刘健敏 夏义本 王林军 张明龙 苏青峰 史伟民 |
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| 作者单位： | 1. 上海大学材料科学与工程学院电子信息材料系,上海,200072;景德镇陶瓷学院,江西景德镇,333001
2. 上海大学材料科学与工程学院电子信息材料系,上海,200072 |
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| 基金项目： | 国家自然科学基金
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上海市纳米科技专项基金
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上海市应用材料研究与发展资助项目
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上海市重点学科建设项目 |
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| 摘 要： | 金刚石以其独特的性能成为辐射探测器的理想材料.采用HFCVD方法制备了高质量、(100)取向的CVD金刚石膜,在此基础上研制出X射线探测器.使用55Fe 5.9keV X射线研究了CVD金刚石膜探测器的光电流和电荷收集效率.结果表明,探测器在偏压加到100V还具有好的欧姆接触;电场为50kV·cm-1时的暗电流与光电流分别为16.3和16.8nA;电荷收集效率η为45.1%,对应的电荷收集距离δ(CCD)为9.0μm.
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| 关 键 词： | CVD金刚石膜 X射线探测器 光电流 电荷收集效率 |
| 文章编号： | 0258-0934(2006)05-0669-04 |
| 修稿时间： | 2005年10月21 |
Study on preparation and properties of X-ray detector based on CVD diamond film |
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| LIU Jian-min,XIA Yi-ben,WANG Lin-jun,ZHANG Ming-long,SU Qing-feng,SHI Wei-min.Study on preparation and properties of X-ray detector based on CVD diamond film[J].Nuclear Electronics & Detection Technology,2006,26(5):669-672. |
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| Authors: | LIU Jian-min XIA Yi-ben WANG Lin-jun ZHANG Ming-long SU Qing-feng SHI Wei-min |
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| Abstract: | The inherent properties of diamond make it an ideal material for radiation detectors.In this work,(100)-textured CVD diamond film with better quality was obtained by using a hot filament chemical vapor deposition(HFCVD) technique to fabricate as X-ray detectors.5.9 keV X-rays were used to investigate the photocurrent and charge collection efficiency of the detector.For the CVD diamond detector,the electrical contact is a fine ohmic for bias voltage up to 100 V,and the darkcurrent of ~16.3 nA and the photocurrent of ~16.8 nA are obtained at an electrical field of 50 kV(cm~(-1).The average charge collection efficiency of ~45.1% corresponding to the charge collection distance(CCD) value of 9.0(m is achieved. |
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| Keywords: | CVD diamond film X-ray detector photocurrent charge collection efficiency |
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