| CCD尺寸检测中安装误差对测量精度的影响 |
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| 引用本文： | 武利生,杨丽凤,李元宗.CCD尺寸检测中安装误差对测量精度的影响[J].仪器仪表学报,2005,26(10):1093-1097. |
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| 作者姓名： | 武利生 杨丽凤 李元宗 |
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| 作者单位： | 太原理工大学,太原,030024 |
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| 基金项目： | 山西省自然科学基金(20021039)资助项目 |
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| 摘 要： | 在用面阵CCD进行尺寸检测时,由于CCD平面与被测尺寸平面不平行而带来了误差。利用齐次坐标变换建立了从工件平面到CCD平面的坐标变换关系,推导尺寸投影变换关系及误差表达式和最大误差公式,并讨论了误差变化的规律及减小或消除这一误差的方法。
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| 关 键 词： | CCD 尺寸检测 误差 |
| 修稿时间： | 2004年2月1日 |
Effect of Alignment Error to Measurement Accuracy in CCD Dimension Measuring System |
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| Wu Lisheng,Yang Lifeng,Li Yuanzong.Effect of Alignment Error to Measurement Accuracy in CCD Dimension Measuring System[J].Chinese Journal of Scientific Instrument,2005,26(10):1093-1097. |
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| Authors: | Wu Lisheng Yang Lifeng Li Yuanzong |
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| Abstract: | In area CCD dimension measuring system,there are kinds of errors brought by unparallelism between CCD plane and measured workpiece plane.The coordinate transformation from workpiece plane to CCD plane is built through homogeneous coordinate transformation,and the relationship of dimension projection transformation is deduced.Finally,error formula and maximal error expression are derived,varying regulation of error is discussed and a method to minish or eliminate the error is given. |
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| Keywords: | CCD Dimension measurement Error |
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