飞秒激光加工最新研究进展

飞秒激光作为一种先进的加工技术,以其"冷加工"、多光子非线性效应、突破衍射极限等特质可实现对任意材料由微纳到宏观尺度复杂三维零件的精密加工,在微纳和精密机械、微纳电子、微纳光学、表面工程、生物医学等领域展露了巨大的市场应用前景。文章重点针对近三年来飞秒激光刻蚀、切割、制孔、功能表面制备、体内加工和聚合加工的研究进展进行综述,并探讨了飞秒激光在与材料相互作用机制、加工精度、加工方式、加工对象等方面面临的机遇和挑战。

Recent Progress in Femtosecond Pulsed Laser Processing Research

As an advanced processing technique, femtosecond laser achieves precision machining of complex three-dimensional parts from micro/nano- to macro-field on any material due to its special properties such as “cold processing”, nonlinear multiphoton effect, and far beyond the optical diffraction limit, etc. Huge market prospect is shown for femtosecond laser application in fields of micro/nano- precision machinery, micro/nano-electronics, micro/nano-photonics, surface engineering and biomedicine, etc. Summary on research progress is made including femtosecond laser ablation, cutting, drilling, functional surface fabrication, in-volume and polymeric processing by femtosecond laser in recently three years. A discussion is made about the opportunities and challenges in femtosecond laser processing from the aspects of laser material interaction mechanism, processing precision, processing method, and processing object, etc.